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Capacitance Manometerの製品一覧

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Ceramic Capacitance Manometer CCMT-D Series

Ceramic Capacitance Manometer CCMT-D Series

The sensor part has a monolithic structure made of ceramic, offering excellent reproducibility and stability. [ULVAC]

The CCMT-D series is a capacitance manometer that detects pressure changes through the deformation of a diaphragm made of ceramic (alumina) in response to gas pressure variations, with the corresponding change in capacitance. The sensor part has an integrated structure made of ceramic, providing excellent reproducibility and stability, allowing for accurate measurement of pressure in low to medium vacuum ranges regardless of the type of gas (absolute pressure gauge). 【Features】 ○ Long-term stability ○ Excellent corrosion resistance due to the use of a ceramic membrane ○ Built-in temperature compensation circuit ○ Newly adopted structure to protect the sensor from dirt ○ Zero point adjustment possible with a push button For more details, please contact us or download the catalog.

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Baratron 600 Series

Baratron 600 Series

Achieve process reproducibility with excellent long-term stability! Capacitance manometer.

The "Baratron 600 Series" is a RoHS-compliant absolute capacitance manometer designed to provide accurate and highly reproducible pressure and vacuum measurements even in harsh process environments. It is utilized as the most stable low-pressure measurement pressure transducer. 【Features】 ■ Achieves a minimum of 2.66 Pa F.S. ■ Directly measures total pressure regardless of gas composition ■ Measures up to 1×10^-4 F.S. with % accuracy ■ Various lineups from temperature-controlled types up to 200°C to those with setpoint relays ■ Corrosion-resistant structure made of all Inconel or Incoloy nickel alloys *For more details, please refer to the PDF document or feel free to contact us.

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Absolute pressure vacuum gauge capacitance manometer

Absolute pressure vacuum gauge capacitance manometer

The pressure inside the vacuum chamber can be measured as absolute pressure!

Capacitance manometer capable of measuring the pressure inside a vacuum chamber as absolute pressure. 【Features】 ○ Capable of measuring vacuum pressure as absolute pressure ○ Gas contact parts made of Inconel, excellent corrosion resistance ○ Total pressure can be measured regardless of gas type ○ Adoption of a unique sensor structure significantly improves zero stability, reliability, and accuracy ○ Excellent long-term reproducibility ○ 2-year warranty ○ Available in general-purpose and self-heating types ○ Digital communication possible via Device Net and RS485 ● For other functions and details, please download the catalog.

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General-purpose capacitance manometer CDLD

General-purpose capacitance manometer CDLD

General-purpose capacitance manometer CDLD

A general-purpose capacitance manometer capable of measuring the pressure inside a vacuum chamber as absolute pressure. 【Features】 ○ Capable of measuring vacuum pressure as absolute pressure ○ Gas contact parts are made of Inconel, offering excellent corrosion resistance ○ Total pressure can be measured regardless of gas type ○ Adoption of a unique sensor structure significantly improves zero stability, reliability, and accuracy ○ Excellent long-term reproducibility ○ 2-year warranty ○ Digital communication possible via Device Net and RS485 ● For other functions and details, please contact us.

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High-Temperature Digital Capacitance Manometer 'DA03A'

High-Temperature Digital Capacitance Manometer 'DA03A'

Reduce zero point shift due to high-temperature operation, for CVD, Etch, and ALD!

The "DA03A" is a RoHS-compliant digital high-temperature type Baratron® capacitance manometer. By operating at high temperatures, it minimizes the deposition of process by-products inside the sensor. This nearly eliminates output drift caused by by-product accumulation. It can be used at operating temperatures of 150°C or 160°C, making it suitable for the most demanding and harsh vacuum processes in semiconductor manufacturing, such as metal etching and insulating film CVD. 【Features】 ■ High-temperature operation at 150°C and 160°C ■ All Inconel capacitance sensor ■ Space-saving compact design ■ Stable performance regardless of gas type ■ EU RoHS compliant *For more details, please refer to the PDF document or feel free to contact us.

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Digital Capacitance Manometer XacTorr

Digital Capacitance Manometer XacTorr

Digital Capacitance Manometer XacTorr

High-temperature heating type also available Capacitance manometer compatible with Device Net 【Features】 ○ Unique sensor structure (MicroLis Mark?W sensor) ○ Protects the diaphragm from contamination ○ Reduces the impact of external temperature changes on output values ○ Dual-zone temperature control By dividing the heater into two parts and digitally controlling each, uniformity and responsiveness are improved ○ Digital circuit configuration Supports digital communication via Device Net and RS485 Eliminates potentiometers, reducing the number of analog components, thereby decreasing aging changes and improving reliability ○ Improved maintainability through GUI software diagnostic functions ● For other functions and details, please contact us.

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  • Capacitance Manometer

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